The Influence of the Power Supply of a Magnetron Sputtering System on the Properties of the Deposited TiO2 Films
Abramov, N. F., Bezrukov, A. V., Vol’pyan, O. D., Obod, Yu. A.Volume:
54
Journal:
Inorganic Materials
DOI:
10.1134/S0020168518150025
Date:
December, 2018
Fichier:
PDF, 1.34 MB
2018