
Comparative study on emission characteristics of d.c.- and r.f.-powered Grimm glow discharge plasmas. Use of argon spectral lines
K. Wagatsuma, Shigeru SuzukiVolume:
358
Langue:
english
Pages:
4
DOI:
10.1007/s002160050473
Date:
June, 1997
Fichier:
PDF, 140 KB
english, 1997