
Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation
Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi, Suzuki, Kazuhiro, Saiki, KazuakiVolume:
5
Année:
2016
Langue:
english
Journal:
IEEJ Journal of Industry Applications
DOI:
10.1541/ieejjia.5.141
Fichier:
PDF, 2.44 MB
english, 2016