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A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines
Liu, Huan, Yu, Zhongliang, Liu, Yan, Fang, XudongVolume:
8
Langue:
english
Journal:
Micromachines
DOI:
10.3390/mi8100304
Date:
October, 2017
Fichier:
PDF, 7.02 MB
english, 2017