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Metal-oxide catalyzed epitaxy (MOCATAXY): the example of the O plasma-assisted molecular beam epitaxy of β-(Al x Ga 1− x ) 2 O 3 /β-Ga 2 O 3 heterostructures
Vogt, Patrick, Mauze, Akhil, Wu, Feng, Bonef, Bastien, Speck, James S.Volume:
11
Langue:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.11.115503
Date:
November, 2018
Fichier:
PDF, 1.53 MB
english, 2018