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Metal organic chemical vapor deposition of m-plane GaN epi-layer using a three-step approach towards enhanced surface morphology
Azman, Adreen, Shuhaimi, Ahmad, Omar, Al-Zuhairi, Kamarundzaman, Anas, Khudus, Muhammad Imran Mustafa Abdul, Ariff, Azharul, Samsudin, M.E.A., Zainal, Norzaini, Rahman, Saadah AbdVolume:
667
Langue:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.09.052
Date:
December, 2018
Fichier:
PDF, 1.55 MB
english, 2018