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Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism
Torres, David, Zhang, Jun, Dooley, Sarah, Tan, Xiaobo, Sepúlveda, NelsonVolume:
8
Langue:
english
Journal:
Micromachines
DOI:
10.3390/mi8050138
Date:
April, 2017
Fichier:
PDF, 3.20 MB
english, 2017