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Direct observation of leakage currents in a metal-insulator-metal capacitor using in-situ transmission electron microscopy
Kim, Kangsik, Kim, Jung Hwa, Park, Bo-Eun, Kim, Hyungjun, Lee, ZonghoonLangue:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aad9bc
Date:
August, 2018
Fichier:
PDF, 1.28 MB
english, 2018