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[Frontiers of Nanoscience] Materials and Processes for Next Generation Lithography Volume 11 || Tip-based nanolithography methods and materials
Krivoshapkina, YanaAnnée:
2016
Langue:
english
DOI:
10.1016/B978-0-08-100354-1.00015-6
Fichier:
PDF, 5.14 MB
english, 2016