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[OSA Applied Industrial Optics: Spectroscopy, Imaging and Metrology - Monterey, California (2012..-..)] Imaging and Applied Optics Technical Papers - Step-height measurement by low-coherence interferometry based on wavelet transform
Suzuki, Takamasa, Atsumi, Satoshi, Sasaki, Osami, Choi, SamuelAnnée:
2012
Langue:
english
DOI:
10.1364/aio.2012.jtu5a.4
Fichier:
PDF, 179 KB
english, 2012