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MEMS Fabry-Pérot Interferometers With Double Membrane Mirrors for Improved Mirror Parallelism
Huber, Christian, Liu, Pengfei, Krammer, Christoph, Stein, Benedikt, Kalt, HeinzAnnée:
2018
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2018.2852839
Fichier:
PDF, 2.44 MB
english, 2018