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Influence of Additives on Surface Smoothness and Polytype Stability in Solution Growth of n-Type 4H-SiC
Komatsu, Naoyoshi, Mitani, Takeshi, Hayashi, Yuichiro, Kato, Tomohisa, Okumura, HajimeVolume:
924
Langue:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.924.55
Date:
June, 2018
Fichier:
PDF, 916 KB
english, 2018