High spatial and temporal resolution film thickness planar sensor: comparison of geometries
Bonilla Riaño, Adriana, Velasco Peña, Hugo Fernando, Hernandez Rodriguez, Oscar Mauricio, Bannwart, Antonio CarlosLangue:
english
Journal:
Sensor Review
DOI:
10.1108/sr-08-2017-0177
Date:
May, 2018
Fichier:
PDF, 477 KB
english, 2018