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Fabrication of sputtered titanium vanadium nitride (TiVN) thin films for micro-supercapacitors
Anusha Thampi, V. V., Nithiyanantham, U., Nanda Kumar, A. K., Martin, Phil, Bendavid, Avi, Subramanian, B.Langue:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-018-9364-x
Date:
June, 2018
Fichier:
PDF, 2.90 MB
english, 2018