Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2010 / 01 Vol. 28; Iss. 1
Electron holography for analysis of deep submicron devices: Present status and challenges
Ikarashi, Nobuyuki, Toda, Akio, Uejima, Kazuya, Yako, Koichi, Yamamoto, Toyoji, Hane, Masami, Sato, HiroshiVolume:
28
Langue:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.3207964
Date:
January, 2010
Fichier:
PDF, 680 KB
english, 2010