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Droplet etching of deep nanoholes for filling with self-aligned complex quantum structures
Küster, Achim, Heyn, Christian, Ungeheuer, Arne, Juska, Gediminas, Tommaso Moroni, Stefano, Pelucchi, Emanuele, Hansen, WolfgangVolume:
11
Langue:
english
Journal:
Nanoscale Research Letters
DOI:
10.1186/s11671-016-1495-5
Date:
December, 2016
Fichier:
PDF, 1.01 MB
english, 2016