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Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N2 plasma
Trieschmann, Jan, Ries, Stefan, Bibinov, Nikita, Awakowicz, Peter, Mraz, Stanislav, Schneider, Jochen M, Mussenbrock, ThomasLangue:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aac23e
Date:
May, 2018
Fichier:
PDF, 1.99 MB
english, 2018