Preparation of SiB4±xand SiB6plates by chemical vapour deposition of SiCl4+ B2H6system
Masakazu Mukaida, Takashi Goto, Toshio HiraiVolume:
27
Langue:
english
Pages:
8
DOI:
10.1007/bf02403671
Date:
January, 1992
Fichier:
PDF, 1.57 MB
english, 1992