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A microelectromechanical systems (MEMS) force-displacement transducer for sub-5 nm nanoindentation and adhesion measurements
Zhang, Youfeng, Oh, Yunje, Stauffer, Douglas, Polycarpou, Andreas A.Volume:
89
Langue:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5021046
Date:
April, 2018
Fichier:
PDF, 2.86 MB
english, 2018