
[IEEE 2017 IEEE Conference on Control Technology and Applications (CCTA) - Mauna Lani Resort, HI, USA (2017.8.27-2017.8.30)] 2017 IEEE Conference on Control Technology and Applications (CCTA) - Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements
Witvoet, Gert, Kulper, Stefan, Kramer, Geerten, Baeten, MaxAnnée:
2017
Langue:
english
DOI:
10.1109/CCTA.2017.8062548
Fichier:
PDF, 2.71 MB
english, 2017