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[IEEE 2017 13th IEEE Conference on Automation Science and Engineering (CASE 2017) - Xi'an (2017.8.20-2017.8.23)] 2017 13th IEEE Conference on Automation Science and Engineering (CASE) - On the accuracy of analytic approximations for the mean cycle time in semiconductor manufacturing equipment with PM events
Lee, Minho, Morrison, James R., Kalir, Adar A., Rozen, KostaAnnée:
2017
Langue:
english
DOI:
10.1109/COASE.2017.8256191
Fichier:
PDF, 226 KB
english, 2017