[IEEE 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Chengdu, China (2017.7.4-2017.7.7)] 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - The development of electron beam absorbed current imaging system using scanning transmission electron microscope and its application
Suzuki, Yuya, Matsumoto, Hiroaki, Tanaka, Hiroyuki, Kageyama, Akira, Nagakubo, Yasuhira, Nakamura, Kuniyasu, Mizuno, TakayukiAnnée:
2017
Langue:
english
DOI:
10.1109/IPFA.2017.8060069
Fichier:
PDF, 558 KB
english, 2017