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[IEEE 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Chengdu, China (2017.7.4-2017.7.7)] 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - High resolution short defect localization in advanced FinFET device using EBAC and EBIRCh
Choi, Hunseong, Heo, Suhaeng, Hong, Hyeyoung, Yang, Seonghyun, Han, Yongwoon, Cho, Yongbeom, Won, Seokjun, Park, TaesooAnnée:
2017
Langue:
english
DOI:
10.1109/IPFA.2017.8060090
Fichier:
PDF, 360 KB
english, 2017