Laser technologies in micro-optics. Part 1. Fabrication of diffractive optical elements and photomasks with amplitude transmission
Veiko, V. P., Korolkov, V. P., Poleshchuk, A. G., Sinev, D. A., Shakhno, E. A.Volume:
53
Langue:
english
Journal:
Optoelectronics, Instrumentation and Data Processing
DOI:
10.3103/S8756699017050077
Date:
September, 2017
Fichier:
PDF, 438 KB
english, 2017