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Hybrid simulation of electron energy distributions and plasma characteristics in pulsed RF CCP sustained in Ar and SiH 4 /Ar discharges
Wang, Xi-Feng, Jia, Wen-Zhu, Song, Yuan-Hong, Zhang, Ying-Ying, Dai, Zhong-Ling, Wang, You-NianVolume:
24
Langue:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.5009416
Date:
November, 2017
Fichier:
PDF, 2.62 MB
english, 2017