Cu Bump Interconnections in 20.MU.m-Pitch at Low Temperature Utilizing Electroless Tin-Plating on 3D Stacked LSI.
Tomita, Yoshihiro, Morifuji, Tadahiro, Tomisaka, Manabu, Sunohara, Masahiro, Nemoto, Yoshihiko, Sato, Tomotoshi, Takahashi, Kenji, Bonkohara, ManabuVolume:
36
Année:
2003
Langue:
english
Journal:
JOURNAL OF CHEMICAL ENGINEERING OF JAPAN
DOI:
10.1252/jcej.36.119
Fichier:
PDF, 8.73 MB
english, 2003