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Removal of Plasma-Induced Physical Damage Formed in Nanoscale Three-Dimensional FinFETs
Yoon, Junho, Lee, Jeongyun, Yoo, Won JongVolume:
12
Langue:
english
Journal:
Nano
DOI:
10.1142/S1793292017500990
Date:
August, 2017
Fichier:
PDF, 798 KB
english, 2017