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Three-Dimensional Nanoscale Mapping of State-of-the-Art Field-Effect Transistors (FinFETs)
Parikh, Pritesh, Senowitz, Corey, Lyons, Don, Martin, Isabelle, Prosa, Ty J., DiBattista, Michael, Devaraj, Arun, Meng, Y. ShirleyLangue:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927617012491
Date:
August, 2017
Fichier:
PDF, 1.15 MB
english, 2017