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A Particle-Augmented Mixed Lubrication Modeling Approach to Predicting Chemical Mechanical Polishing
Terrell, Elon J., Higgs, C. FredVolume:
131
Année:
2009
Langue:
english
Journal:
Journal of Tribology
DOI:
10.1115/1.2991173
Fichier:
PDF, 1.29 MB
english, 2009