[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Impact of Millisecond Laser Anneal on the Thermal Stress- Induced Defect Creation in Si1-xGex Source /Drain Junctions
Bargallo Gonzalez, Mireia, Simoen, Eddy, Rosseel, Erik, Verheyen, Peter, Souriau, Laurent, Geypen, Jef, Bender, Hugo, Yves Hoffmann, Thomas, Loo, Roger, Absil, Philippe, Claeys, CorVolume:
13
Année:
2008
Langue:
english
DOI:
10.1149/1.2911481
Fichier:
PDF, 423 KB
english, 2008