Influence of rapid thermal processing on carrier concentration in high resistivity silicon
Capello, Luciana, Bertrand, Isabelle, Kononchuk, OlegVolume:
214
Langue:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201700275
Date:
July, 2017
Fichier:
PDF, 1.17 MB
english, 2017