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[IEEE 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Tokyo, Japan (2017.5.16-2017.5.18)] 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - 3-Layered Au/SiO2 hybrid bonding with 6-μm-pitch au electrodes for 3D structured image sensors
Honda, Yuki, Goto, Masahide, Watabe, Toshihisa, Hagiwara, Kei, Nanba, Masakazu, Iguchi, Yoshinori, Saraya, Takuya, Kobayashi, Masaharu, Higurashi, Eiji, Toshiyoshi, Hiroshi, Hiramoto, ToshiroAnnée:
2017
Langue:
english
DOI:
10.23919/LTB-3D.2017.7947403
Fichier:
PDF, 426 KB
english, 2017