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Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis
Okamoto, Yuki, Lebrasseur, Eric, Mori, Isao, Marty, Frederic, Mita, YoshioAnnée:
2017
Langue:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2017.2694845
Fichier:
PDF, 2.08 MB
english, 2017