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A micromachined piezoelectric microgripper for manipulation of micro/nanomaterials
Shi, Huaduo, Shi, Weiliang, Zhang, Ran, Zhai, Junyi, Chu, Jinkui, Dong, ShuxiangVolume:
88
Langue:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4985110
Date:
June, 2017
Fichier:
PDF, 14.81 MB
english, 2017