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[IEEE 2017 IEEE International Memory Workshop (IMW) - Monterey, CA, USA (2017.5.14-2017.5.17)] 2017 IEEE International Memory Workshop (IMW) - In Depth Analysis of 3D NAND Enablers in Gate Stack Integration and Demonstration in 3D Devices
Tan, Chi Lim, Lavizzari, Simone, Blomme, Pieter, Breuil, Laurent, Vecchio, Guglielma, Sebaai, Farid, Paraschiv, Vasile, Tao, Zheng, Schepers, Bart, Nyns, Laura, Peter, Antony, Dekkers, Harold, Ong, PaAnnée:
2017
Langue:
english
DOI:
10.1109/IMW.2017.7939090
Fichier:
PDF, 943 KB
english, 2017