P-183: Study of Electrical Probing through Thin-film Encapsulation Made of Al 2 O 3 Films Deposited by Low Temperature ALD onto Different Metallic Underlayers
Maindron, Tony, Troc, Nicolas, Aventurier, Bernard, Mandrillon, Vincent, Delaye, Vincent, Vandeneynde, AurelieVolume:
48
Langue:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.12025
Date:
May, 2017
Fichier:
PDF, 2.70 MB
english, 2017
File converter
Plus de résultats de recherche
More benefits 
