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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Advances in Patterning Materials and Processes XXXIV - Separating the optical contributions to line-edge roughness in EUV lithography using stochastic simulations
Hohle, Christoph K., Gronheid, Roel, Chunder, Anindarupa, Latypov, Azat, Chen, Yulu, Biafore, John J., Levinson, Harry J., Bailey, ToddVolume:
10146
Année:
2017
Langue:
english
DOI:
10.1117/12.2258693
Fichier:
PDF, 428 KB
english, 2017