Quantitative Evaluation of Cobalt Disilicide/Si Interfacial Roughness
Yang, Jing, Feng, Jun, Li, Kecheng, Bhandari, Harish B., Li, Zhefeng, Gordon, Roy G.Volume:
6
Année:
2017
Langue:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0271705jss
Fichier:
PDF, 630 KB
english, 2017