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[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - Characterization of nonstoichiometric silicon nitride PECVD/ALD films for IR micro-detectors array
Rudakov, Grigory A., Sigarev, Andrey A., Fedirko, Valeriy A., Fetisov, Evgeniy A.Année:
2016
Langue:
english
DOI:
10.1109/BALD.2016.7886527
Fichier:
PDF, 453 KB
english, 2016