Advanced Cryogenic Aerosol Cleaning: Small Particle Removal and Damage-Free Performance
Mbanaso, Chimaobi, Butterbaugh, Jeffery W., Becker, David Scott, Printz, Wallace P., Rotondaro, Antonio L.P., Bassett, Derek W., Thomes, Gregory P., Schwab, Brent D., Rathman, Christina Ann, LauerhaasVolume:
255
Langue:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.255.195
Date:
September, 2016
Fichier:
PDF, 6.56 MB
english, 2016
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