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[IEEE 2016 IEEE National Aerospace and Electronics Conference (NAECON) and Ohio Innovation Summit (OIS) - Dayton, OH, USA (2016.7.25-2016.7.29)] 2016 IEEE National Aerospace and Electronics Conference (NAECON) and Ohio Innovation Summit (OIS) - Improved grayscale lithography
Laurvick, Tod, Coutu, Ronald A.Année:
2016
Langue:
english
DOI:
10.1109/NAECON.2016.7856824
Fichier:
PDF, 2.03 MB
english, 2016