AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Phosphorous transient enhanced diffusion suppression and activation enhancement with cluster carbon co-implantation
Nakashima, Yoshiki, Hamamoto, Nariaki, Nagayama, Tsutomu, Koga, Yuji, Umisedo, Sei, Kawamura, Yasunori, Hashimoto, Masahiro, Onoda, HiroshiAnnée:
2012
DOI:
10.1063/1.4766501
Fichier:
PDF, 257 KB
2012
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