Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges
Derzsi, Aranka, Bruneau, Bastien, Gibson, Andrew Robert, Johnson, Erik, O’Connell, Deborah, Gans, Timo, Booth, Jean-Paul, Donkó, ZoltánVolume:
26
Langue:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aa56d6
Date:
February, 2017
Fichier:
PDF, 8.51 MB
english, 2017
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