AIP Conference Proceedings [AIP STRESS-INDUCED PHENOMENA IN METALLIZATION: 11th International Workshop - Bad Schandau, (Germany) (12–14 April 2010)] - Electron Backscattered Diffraction Analysis Of Narrow Copper Interconnects In Cross-View To Investigate Scale Effect On Microstructure.
Galand, Romain, Clément, Laurent, Waltz, Patrice, Wouters, Yves, Zschech, Ehrenfried, Ogawa, Shinichi, Ho, Paul S.Année:
2010
Langue:
english
DOI:
10.1063/1.3527137
Fichier:
PDF, 2.94 MB
english, 2010
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