Effect of Growth Rate and Wafering on Residual Stress of Diamond Wire Sawn Silicon Wafers
Kumar, Arkadeep, Prasath, R.G.R., Pogue, Vanessa, Skenes, Kevin, Yang, Chris, Melkote, Shreyes N., Danyluk, StevenVolume:
5
Année:
2016
Langue:
english
Journal:
Procedia Manufacturing
DOI:
10.1016/j.promfg.2016.08.108
Fichier:
PDF, 11.61 MB
english, 2016