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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Advanced technology nodes, a foundry perspective
Faul, Jürgen, Hoentschel, Jan, Wiatr, Maciej, Horstmann, ManfredAnnée:
2012
Langue:
english
Journal:
AIP Conference Proceedings
DOI:
10.1063/1.4766478
Fichier:
PDF, 656 KB
english, 2012