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Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone
Klesko, Joseph P., Bellow, James A., Saly, Mark J., Winter, Charles H., Julin, Jaakko, Sajavaara, TimoVolume:
34
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4961385
Date:
September, 2016
Fichier:
PDF, 548 KB
english, 2016