
Photosensitive Polyimide Protected by Tetrahydropyranyl Group Based on Chemical Amplification.
Naitoh, Kazuhiko, Ishii, Kazuhisa, Yamaoka, Tsuguo, Omote, ToshihikoVolume:
5
Année:
1992
Langue:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.5.339
Fichier:
PDF, 221 KB
english, 1992