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Oil-lubricated friction characteristic of Si-containing hydrogenated carbon nitride films deposited by PECVD
KITAZUME, Kazutaka, KOUSAKA, Hiroyuki, TOKOROYAMA, Takayuki, UMEHARA, Noritsugu, FUWA, Yoshio, MANABE, KazuyoshiVolume:
80
Année:
2014
Langue:
english
Journal:
Transactions of the JSME (in Japanese)
DOI:
10.1299/transjsme.2014trans0340
Fichier:
PDF, 1.48 MB
english, 2014