
Development and estimation of a nano-beam secondary ion mass spectrometry apparatus.
NOJIMA, Masashi, KANDA, Yusuke, TOI, Masayuki, TOMIYASU, Bunbunoshin, SAKAMOTO, Tetsuo, OWARI, Masanori, NIHEI, YoshimasaVolume:
52
Année:
2003
Journal:
BUNSEKI KAGAKU
DOI:
10.2116/bunsekikagaku.52.179
Fichier:
PDF, 966 KB
2003